...

Silicon Carbide Cantilever Paddle

  • [Introduction]: The cantilever paddle has stable performance, does not deform under a high-temperature environment, and has a large wafer loading capacity. It is suitable for robot automatic loading and handling systems. Because the cross-section of the cantilever paddle is stable and does not deform, it is possible to use the existing furnace tube to prepare larger wafers. The thermal expansion coefficient of the cantilever paddle is similar to that of the LPCVD coating. When applied to LPCVD, it greatly prolongs the maintenance and cleaning cycle and greatly reduces pollutants.
  • [Size]:
    L2378mm
    L2550mm
    L2660mm
    Dimensions can be customized
  • [Capacity]: 0.24~12m3/min
ItemUnitData
RBSiC(SiSiC)NBSiCSSiCRSiCOSiC
SiC content%857599≥99≥90
Free silicon content%150000
Max service temperature13801450165016201400
Densityg/cm33.022.75-2.853.08-3.162.65-2.752.75-2.85
Open porosity%013-15015-187-8
Bending strength  20℃Mpa250160380100/
Bending strength 1200℃Mpa280180400120/
Modulus of elasticity  20℃Gpa330580420240/
Modulus of elasticity 1200℃Gpa300//200/
Thermal conductivity   1200℃W/m.k4519.6100-12036.6/
Coefficient of thermal expansionK-1×10-64.54.74.14.69/
HVkg/mm22115/2800//

The reaction sintered silicon carbide cantilever paddle is a key component of the semiconductor wafer loading system. The silicon carbide paddles used in the photovoltaic new energy industry, with main specifications of 2378 mm, 2550 mm, 2660 mm, etc. It is used in the process of (diffusion) coating polycrystalline silicon wafers or monocrystalline silicon wafers in a diffusion furnace, and has a bearing and transporting effect on silicon wafers in a high-temperature environment (1000—1300°C).

The two packing methods we use are plywood box packing and solid wood packing, with the solid wood box requires a fumigation certificate. Depending on the various products, we will tailor the proper packaging box; Plastic foam measuring 2 cm to 3 cm thick is placed within the box and secured with row nails. To maintain the products safety during shipment, packing tape is typically used.

Cantilever-Paddle
Cantilever Paddle
Grinding-Barrel-11
Grinding Barrel
Roller-p1
Roller
error: Content is protected !!

Get an instant quote from our most experienced consultants.

× How can I help you?
Seraphinite AcceleratorOptimized by Seraphinite Accelerator
Turns on site high speed to be attractive for people and search engines.