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Silicon Carbide Cantilever Paddle

  • [Introduction]: The cantilever paddle has stable performance, does not deform under a high-temperature environment, and has a large wafer loading capacity. It is suitable for robot automatic loading and handling systems. Because the cross-section of the cantilever paddle is stable and does not deform, it is possible to use the existing furnace tube to prepare larger wafers. The thermal expansion coefficient of the cantilever paddle is similar to that of the LPCVD coating. When applied to LPCVD, it greatly prolongs the maintenance and cleaning cycle and greatly reduces pollutants.
  • [Size]:
    L2378mm
    L2550mm
    L2660mm
    Dimensions can be customized
  • [Capacity]: 0.24~12m3/min
Item Unit Data
RBSiC(SiSiC) NBSiC SSiC RSiC OSiC
SiC content % 85 75 99 ≥99 ≥90
Free silicon content % 15 0 0 0 0
Max service temperature 1380 1450 1650 1620 1400
Density g/cm3 3.02 2.75-2.85 3.08-3.16 2.65-2.75 2.75-2.85
Open porosity % 0 13-15 0 15-18 7-8
Bending strength  20℃ Mpa 250 160 380 100 /
Bending strength 1200℃ Mpa 280 180 400 120 /
Modulus of elasticity  20℃ Gpa 330 580 420 240 /
Modulus of elasticity 1200℃ Gpa 300 / / 200 /
Thermal conductivity   1200℃ W/m.k 45 19.6 100-120 36.6 /
Coefficient of thermal expansion K-1×10-6 4.5 4.7 4.1 4.69 /
HV kg/mm2 2115 / 2800 / /

The reaction sintered silicon carbide cantilever paddle is a key component of the semiconductor wafer loading system. The silicon carbide paddles used in the photovoltaic new energy industry, with main specifications of 2378 mm, 2550 mm, 2660 mm, etc. It is used in the process of (diffusion) coating polycrystalline silicon wafers or monocrystalline silicon wafers in a diffusion furnace, and has a bearing and transporting effect on silicon wafers in a high-temperature environment (1000—1300°C).

The two packing methods we use are plywood box packing and solid wood packing, with the solid wood box requires a fumigation certificate. Depending on the various products, we will tailor the proper packaging box; Plastic foam measuring 2 cm to 3 cm thick is placed within the box and secured with row nails. To maintain the products safety during shipment, packing tape is typically used.

Cantilever-Paddle
Cantilever Paddle
Grinding-Barrel-11
Grinding Barrel
Roller-p1
Roller
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